Mems Microrelay: Design, Modeling, and Simulation

Abstract

A newly design of single pole single throw piezoelectric vertical actuation MEMS microrelay was successfully designed and modeled at the end of this project. This was implemented by using MEMS Pro LEdit CAD Modeler. Then, the finalize bimorph sandwich fixed-fixed model had been simulated and analyzed with numerical analyses by using SamCef Field Oofelie FEM CAD software and some other analyzer created with MathCAD. The design was based on Zinc Oxide phenomena of inverse piezoelectric effect and some other mechanical beam structure considerations. It is capable to be switched in low driving voltage about 7V for 2μm displacement distance at resonant frequency about 335.87 kHz. Its flat-to-flat contact surfaces have a good contact area and given a low on-resistance about 0.3Ω with a contact force about 4μN. Then, its 51.537Ω characteristic impedance of the microstrip line had given a perfect impedance matching. So that, this piezoelectric actuation microrelay is well suited in RF telecommunications due to its tiny size, do not produce magnetic fields nor affected by them, and its ability of piezoelectric effect continue to operate even at temperature close to 0°K enable it for a broad application area.