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Issue Date
Title
Author(s)
19-May-2006
MOS Transistor Mask Design Using SEM Based E-Beam Lithography
Uda, Hashim, Prof. Dr.
;
Nur Hamidah, Abdul Halim
;
Mohammad Nuzaihan, Md Nor
;
Zul Azhar, Zahid Jamal, Prof. Dr.
;
uda@kukum.edu.my
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Author
1
Mohammad Nuzaihan, Md Nor
1
Nur Hamidah, Abdul Halim
1
Uda, Hashim, Prof. Dr.
1
Zul Azhar, Zahid Jamal, Prof. Dr.
Subject
1
E-Beam Lithography (EBL)
1
ITEX 2006
1
KUKUM -- Research
1
MOS Transistor Mask Design
Date issued
1
2006