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Theses & Dissertations
School of Microelectronic Engineering (Theses)
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Issue Date
Title
Author(s)
2011
Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization
Siti Fatimah, Abd Rahman
2007
Fabrication of Silicon Nanowires using Scanning Electron Microscope based Electron Beam Lithography method
Mohammad Nuzaihan Md Nor
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Mohammad Nuzaihan Md Nor
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Siti Fatimah, Abd Rahman
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Nanotechnology
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Nanowires -- Design and construction
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Silicon
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Nanostructured materials
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Silicon nanowires (SiNWs)
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Date issued
1
2011
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2007