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Theses & Dissertations
School of Microelectronic Engineering (Theses)
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Issue Date
Title
Author(s)
2007
Fabrication of Silicon Nanowires using Scanning Electron Microscope based Electron Beam Lithography method
Mohammad Nuzaihan Md Nor
2007
Fabrication and characterization of ultra thin Si0₂ for nano devices: surface morphology and electrical study
Mohd Faiz Aizad, Abdul Fatah
;
Uda Hashim, Assoc. Prof. Dr.
2007
Characterization of alignment mark to obtain reliable alignment performance in advanced lithography
Normah, Ahmad
;
Uda Hashim, Prof. Madya Dr.
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Author
1
Mohammad Nuzaihan Md Nor
1
Mohd Faiz Aizad, Abdul Fatah
1
Normah, Ahmad
Subject
1
Alignment
1
Alignment process
1
ASML Scanner Alignment System
1
Electric insulators and insulatio...
1
Microlitoghraphy
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