Silicon implementation of micro pressure sensor

Abstract

Pressure sensing is one of the mostly performed measurement encompassing varieties of applications. The latest technology such as silicon based Micro-electromechanical Systems (MEMS) technology is favoured due to its competitive cost and proven performance. In our research, MEMS pressure sensor for biomedical application is investigated. There are a number of stages involved in our research for implementation of a MEMS pressure sensor which includes application review, conceptual design, modeling, simulation, tape-out, fabrication and characterization. A highly proven technology offered by Infineon Technologies SensorNor AS is used in this research and the requirements are discussed. Recently, the device is successfully implemented on silicon and our research is now entering the characterization stage. In this paper, the research work prior to fabrication, the fabrication result and the post foundry packaging tasks for full device characterization are discussed. Future works are also discussed in the final section.