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Browsing by Author Siew Chui, Goh
Showing results 1 to 2 of 2
| Issue Date | Title | Author(s) |
| 2014 | Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous | Zaliman, Sauli, Dr.; Retnasamy, Vithyacharan; Aaron, Koay Terr Yeow; Siew Chui, Goh; Khairul Anwar, Mohamad Khazali; Nooraihan, Abdullah; zaliman@unimap.edu.my |
| 2014 | Surface roughness scrutinizaton with RIE CF₄+Argon gaseous on platinum deposited wafer | Zaliman, Sauli, Dr.; Retnasamy, Vithyacharan; Aaron, Koay Terr Yeow; Siew Chui, Goh; Khairul Anwar, Mohamad Khazali; Nooraihan, Abdullah; zaliman@unimap.edu.my |
