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Browsing by Author Mohd Jeffery, Manaf
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| 2007 | Effect of alignment mark architecture on alignment signal behavior in advanced lithography | Normah, Ahmad; Uda, Hashim; Mohd Jeffery, Manaf; Kader Ibrahim, Abdul Wahab |