A Cost Effective Negative Plenum Cleanroom for Microelectronic Engineering Undergraduate Programme
Uda, Hashim, Prof. Madya Dr.
Zul Azhar, Zahid Jamal, Prof. Dr.
Nur Hamidah, Abdul Halim
Mohammad Nuzaihan, Md Nor
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To design and build a microelectronic cleanroom which is compatible to other commercially installed clenroom for the purpose of teaching undergraduate and postgraduate students in the field of microelectronic fabrication.