Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Subject "Photoresist"
Now showing items 1-3 of 3
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Conventional photolithography and process optimization of pattern- size expansion technique for nanogap biosensor fabrication
(Trans Tech Publications, 2014)For a submicron photolithography process, there is little room for error. In this paper, an optimized technique for photoresist (PR) development is reported, to fabricate a nanogap biosensor for application in biomedical ... -
Fabrication of nanowire using ash trimming technique
(Trans Tech Publications, 2013)The paper present a report on fabrication of Nanowire using plasma oxidation, we monitor changes by studying the morphology and Δw/Δh, the study also revealed that the proposed fabrication method could potentially be used ... -
Parametric study and thickness evaluation of photoresist development for the formation of microgap electrodes using surface nanoprofiler
(Scientific.Net, 2012-12)A compact nanolaboratory on single chip is one of the challenging tasks for future reproductively of sensitive and selective lab-on-chip. This paper reports a simple and controllable technique for patterning microgap ...