Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Subject "Ph detection"
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Design and fabrication of silicon nanowire based sensor
(Electrochemical Science Group (ESG), 2013)This paper reports the process development of silicon nanowires sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. By using silicon-on-insulator (SOI) wafer as a ...