Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Subject "Clinical diagnostics"
Now showing items 1-2 of 2
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Conventional photolithography and process optimization of pattern- size expansion technique for nanogap biosensor fabrication
(Trans Tech Publications, 2014)For a submicron photolithography process, there is little room for error. In this paper, an optimized technique for photoresist (PR) development is reported, to fabricate a nanogap biosensor for application in biomedical ... -
Nanoelectrode chrome photomask design and specification for biosensor fabrication
(Trans Tech Publications, 2013)This paper explains the most crucial part of any microchip fabrication, which is the mask design for photolithography process. The design is initially sketched roughly to meet the design specification and later on designed ...