MOSFET Technology for Microelectronic Engineering Undergraduate Programme
Zul Azhar, Zahid Jamal, Prof. Dr.
Uda, Hashim, Prof. Dr.
Nur Hamidah, Abdul Halim
Mohammad Nuzaihan, Md Nor
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This project focused on the process development of MOSFET fabrication. Microelectronic fabrication equipment and facilities from the micro fabrication cleanroom laboratory in KUKUM were used for the purposes of this project. A number of complete process flow and device fabrication modules were developed. The modules provide users with a complete process flow and recipes for the manufacturing of MOSFET fabrication from bare to final fabricated transistor. Any other similar organizations or industries who aspire to have similar setup need not search far and wide because the modules produced by KUKUM is very comprehensive and thorough.