Material selection for CMOS compatible high Q and high frequency MEMS disk resonator using Ashby approach
Date
2016Author
G. M., Sundaram
Angira, Mahesh
Gupta, Navneet
Rangra, Kamaljit
Metadata
Show full item recordAbstract
In this paper, the most appropriate material for MEMS Disk resonator compatible
with CMOS technology is selected using the Ashby approach. Materials indices are
formulated based on three primary performance parameters, namely high Q, high resonant frequency, and low process temperature. The selection chart shows that for high Q and high frequency, polySi0.35Ge0.65 is the best possible material for MEMS resonator. The close match between theoretical and experimental findings validates our proposed study.