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    • Silicon implementation of micro pressure sensor 

      Yufridin, Wahab; Zayegh, Aladin; Begg, Rezaul (Institute of Electrical and Electronics Engineers (IEEE), 2010-04-12)
      Pressure sensing is one of the mostly performed measurement encompassing varieties of applications. The latest technology such as silicon based Micro-electromechanical Systems (MEMS) technology is favoured due to its ...