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    Design and fabrication of silicon nanowire based sensor 

    Siti Fatimah, Abd Rahman; Nor Azah, Yusof, Prof. Dr.; Uda, Hashim, Prof. Dr.; Mohammad Nuzaihan, Md Nor (Electrochemical Science Group (ESG), 2013)
    This paper reports the process development of silicon nanowires sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. By using silicon-on-insulator (SOI) wafer as a ...

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    AuthorMohammad Nuzaihan, Md Nor (1)Nor Azah, Yusof, Prof. Dr. (1)Siti Fatimah, Abd Rahman (1)Uda, Hashim, Prof. Dr. (1)SubjectElectron beam lithography (1)Ph detection (1)Resistivity (1)Silicon nanowire (1)... View MoreDate Issued
    2013 (1)

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