Browsing Mohammad Nuzaihan Md Nor, Associate Professor Dr. by Subject "Semiconductor device"
Now showing items 1-1 of 1
-
Application of e-beam lithography for nanowire development
(Universiti Malaysia Perlis (UniMAP)Centre for Graduate Studies, 2010-10-16)Miniaturization and performance improvements are driving the electronics industry to shrink the feature size of semiconductor device. Because of its diffraction limit, conventional photolithography is becoming increasingly ...