Browsing Mohammad Nuzaihan Md Nor, Associate Professor Dr. by Author "Siti Fatimah, Abd Rahman"

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    • Design and fabrication of silicon nanowire based sensor 

      Siti Fatimah, Abd Rahman; Nor Azah, Yusof, Prof. Dr.; Uda, Hashim, Prof. Dr.; Mohammad Nuzaihan, Md Nor (Electrochemical Science Group (ESG), 2013)
      This paper reports the process development of silicon nanowires sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. By using silicon-on-insulator (SOI) wafer as a ...

    • Design and process development of silicon nanowire based DNA biosensor using electron beam lithography 

      Uda, Hashim; Siti Fatimah, Abd Rahman; Mohammad Nuzaihan, Md Nor; Shahrir, Salleh (Institute of Electrical and Electronics Engineering (IEEE), 2008-12-01)
      Silicon nanowires (SiNWs) have their unique feature such as similar diameters to biomolecules, chemically tailorable physical properties, enable to apply in biomolecule detection and can be fabricated as a high performance ...