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Micro-reservoir depth determination with Twyman-Green Interferometer
(Universiti Malaysia Perlis (UniMAP), 2010-10-16)
A micro-reservoir is fabricated on transparent silica wafer using Reactive Ion Etching (RIE). The depth of the micro-reservoir has been measured using profilometer, Atomic Force Microscopy (AFM) and Twyman Green-Interferometer. ...