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Design and analysis of film bulk acoustic wave resonator in Ku-band frequency for wireless communication
(Society of Photo-Optical Instrumentation Engineers (SPIE), 2012-03-12)
This paper presents design of a Film Bulk Acoustic Wave Resonators (FBARs) consisting of piezoelectric film, aluminium nitride (AlN) with top and bottom electrodes of ruthenium (Ru). The lumped Butterworth-Van Dyke (BVD) ...