Design, simulation and characterization of Moly Permalloy based electromagnetic sensor

Abstract

This paper shows the design, simulation and characterization of Moly Permalloy based electromagnetic sensor in MEMS software. The dimension of the device is minimized to the smallest that the software can be simulated to 1 μm. Several models have been simulated which differs in thickness of the material layer and design of the layers. The models are simulated separately to get the desired results in term of current and magnetic induction.