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    • Design and fabrication of n-isfet using SI₃N₄/SIO₂ structure for pH measurement 

      Nur Syuhada, Md. Desa (Universiti Malaysia Perlis (UniMAP)Institute of Nano Electronic Engineering, 2013)
      The design and fabrication of n-ISFET using Si₃N₄/SiO₂ structure for pH measurement has been carried out. In general Ion Sensitive Field Effect Transistor (ISFET) is a potentiometric pH sensor which widely used in chemical, ...