Browsing Universiti Malaysia Perlis by Subject "MEMS tehnology"
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Development of MEMS Manifold Absolute Pressure Sensor (MAPs) Prototype
(Malaysian Invention and Design Society (MINDS), 2007-05-18)The pressure sensor is a monolithic absolute pressure transducer. The transducer utilizes as sensing element, which varies its output voltage when pressure is applied to surface micro-machined silicon diaphragm.