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    • Design and Fabrication of MEMS Heatuator for Automotive Device Applications 

      Zaliman, Sauli, Prof. Madya; Hasnizah, Aris; Razaidi, Hussin; Mohd Hafiz, Ismail; Rizalafande, Che Ismail (Malaysian Invention & Design Society (MINDS), 2006)
      Heatuator is one kind of actuators that converts energy to appropriate actions. The device is typical thermal actuator capable of over 20 micronewtons of force, over 10 um of deflection, at an input electrical power of 25 ...