Browsing Universiti Malaysia Perlis by Author "zaliman@unimap.edu.my"

Now showing items 1-3 of 3

    • Design and Fabrication of MEMS Micro Switch for Rf Applications 

      Zaliman, Sauli, Prof. Madya; Hasnizah, Aris; Razaidi, Hussin; Mohd Hafiz, Ismail; Rizalafande, Che Ismail (Malaysian Invention & Design Society (MINDS), 2006)
      MEMS Micro Switch is fabricated on a high-resistivity silicon substrate. A thin layer of polysilicon is deposited and patterned to define the top electrode.

    • Development of MEMS Manifold Absolute Pressure Sensor (MAPs) Prototype 

      Zaliman, Sauli, Assoc. Prof.; Hasnizah, Aris; Johari, Adnan, Assoc. Prof. Dr.; Poopalan, Prabakaran, Assoc. Prof. Dr.; Ramzan, Mat Ayub; Rizalafande, Che Ismail; Sohiful Anuar, Zainol Murad; Azuwir, Md. Nor; Abu Hassan, Abdullah; Mohd. Hatta, Musa; Razaidi, Hussin (Kementerian Pengajian Tinggi Malaysia (KPTM), 2007-08-10)
      The pressure sensor is a monolithic absolute pressure transducer. The transducer utilizes as sensing element, which varies its output voltage when pressure is applied to surface micro-machined silicon diaphragm.

    • Development of MEMS Manifold Absolute Pressure Sensor (MAPs) Prototype 

      Zaliman, Sauli, Assoc. Prof.; Hasnizah, Aris; Johari, Adnan, Assoc. Prof. Dr.; Poopalan, Prabakaran, Assoc. Prof. Dr.; Ramzan, Mat Ayub; Rizalafande, Che Ismail; Sohiful Anuar, Zainol Murad; Azuwir, Md. Nor; Abu Hassan, Abdullah; Mohd. Hatta, Musa; Razaidi, Hussin (Malaysian Invention and Design Society (MINDS), 2007-05-18)
      The pressure sensor is a monolithic absolute pressure transducer. The transducer utilizes as sensing element, which varies its output voltage when pressure is applied to surface micro-machined silicon diaphragm.