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Development of MEMS Manifold Absolute Pressure Sensor (MAPs) Prototype
(Kementerian Pengajian Tinggi Malaysia (KPTM), 2007-08-10)
The pressure sensor is a monolithic absolute pressure transducer. The transducer utilizes as sensing element, which varies its output voltage when pressure is applied to surface micro-machined silicon diaphragm.
Microelectromechanical Systems (MEMS) Heatuator
(International Exhibition of Inventions, 2007-04-18)
Heatuator is a thermal actuator that converts electrical energy to mechanical motions. For an input electrical power of 25 mW (5V, 5mA), this device is capable of over 20uN of force with 10um of deflection. This heatuator ...