Browsing International Journal of Nanoelectronics and Materials (IJNeaM) by Subject "Rapid thermal annealing"
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Effect of rapid thermal annealing on performance of large area crystalline silicon position sensitive detector
(Universiti Malaysia Perlis, 2009)In this paper we report on the effect of rapid thermal annealing (RTA) on the characteristics of diffused crystalline p-n Si one-dimensional (1-D) position sensitive detector (PSD). The Si-PSDs are made with planer technology ...