Browsing International Journal of Nanoelectronics and Materials (IJNeaM) by Subject "Ferric chloride etchant"

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    • Wet transfer process for MEMS freestanding PMMA/Graphene membrane development 

      Norliana, Yusof; Badariah, Bais; Norhayati, Soin; Burhanuddin, Yeop Majlis (Universiti Malaysia Perlis (UniMAP), 2020-12)
      Process of transferring poly (methyl methacrylate) (PMMA)/Graphene layer to form a freestanding membrane requires a proper method to ensure that the membrane is well suspended with high graphene coverage. This paper ...