Browsing International Journal of Nanoelectronics and Materials (IJNeaM) by Subject "Blue LED"
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Effect of discharge power on the properties of GaN thin films on AlN-(002) prepared by magnetron sputtering deposition
(Universiti Malaysia Perlis (UniMAP), 2020-07)Aluminum nitride (AlN) and gallium nitride (GaN) thin films were grown on silicon (Si) substrates using the conventional RF magnetron sputtering plasma deposition system. The growth rate of GaN increased as the deposition ...