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Mask design for the reproducible fabrication and reliable pattern transfer for polysilicon nanowire
(Institute of Electrical and Electronics Engineers (IEEE), 2012)
In fabrication of Nanowire alignment and exposure are the most critical steps in photolithography process, the resolution requirements and precise alignment are vital, each mask needs to be precisely aligned with original ...
Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method
(Institute of Electrical and Electronics Engineers (IEEE), 2008-11-04)
The use of Silicon nanowires has allowed the introduction of many new signal transduction technologies in biosensors. The sensitivity and performance of biosensors is being improved by using doping process for their ...
Brief review on ZnO Synthesis methods, thin film & nanowire gas sensors
(Universiti Malaysia Perlis (UniMAP), 2010-10-16)
ZnO nanowires are ideal building blocks for a wide range of nanoscale electronics, optoelectronics, and chemical sensing devices. The material properties change when the material is in nanowire form as compare to thin film ...
Microstructure and polymer choice in microfluidic interfacing for nanoscale biosensing
(Institute of Electrical and Electronics Engineers (IEEE), 2012-02-27)
Miniaturization of Biosensors based on nanotechnology are rapidly developing with gaining of undisputable ground and are becoming widespread in the biomedical with capability of improving the existing current
diagnosis ...
Pattern designed for combination of optical lithography and electron beam lithography
(Universiti Malaysia Pahang, 2009-06-20)
In this paper the fabricated pattern of
nanometer and micrometer structures created with
electron beam lithography (EBL) and optical
lithography on silicon on insulator (SOI) material
is presented. The resist used to ...