Browsing Conference Papers by Author "Tengku Nadzlin, Tengku Ibrahim"
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An introduction to optical emission spectroscopy and laser-aided spectroscopy techniques for low-temperature plasma analyses
Nafarizal, Nayan; Rahmat, Sanudin; Tengku Nadzlin, Tengku Ibrahim (Universiti Malaysia Pahang, 2009-06-20)Low-temperature plasma is a tool that has been used widely for surface modification of materials from 70’s. Such as in the microelectronic and semiconductors industries, inductively coupled plasma and capacitively coupled ...