Browsing Conference Papers by Author "Leow, Pei Ling"
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Mask design for the reproducible fabrication and reliable pattern transfer for polysilicon nanowire
Tijjani Adam, Shuwa; Uda, Hashim, Prof. Dr.; Leow, Pei Ling (Institute of Electrical and Electronics Engineers (IEEE), 2012)In fabrication of Nanowire alignment and exposure are the most critical steps in photolithography process, the resolution requirements and precise alignment are vital, each mask needs to be precisely aligned with original ...