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High speed and low power devices : bulk silicon versus SOI
(Kolej Universiti Kejuruteraan Utara Malaysia, 2005-04)
Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities
(Kolej Universiti Kejuruteraan Utara Malaysia, 2005-05-18)
This paper presents the module development of inhouse MOS transistor device at KUKUM Micro Fabrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four ...