Browsing Uda Hashim, Prof. Ts. Dr. by Subject "Silicon-on-insulator (SOI)"
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Si-quantum Dots (QD) and SiO2 tunnel barriers
(Universiti Malaysia Perlis (UniMAP)Pejabat Timbalan Naib Canselor (Penyelidikan dan Inovasi), 2008-07)Oxidation of Si for nanostructures on silicon-on-insulator (SOI) substrates is a key process in the fabrication of Si single electron transistor (SET). The most di cult aspect of the fabrication process is the formation ...