Now showing items 1-2 of 2

    • CdS film thickness characterization by R.F. magnetron sputtering 

      Uda, Hashim, Prof. Dr.; Kasim, Abdul Rahman; Hakim; Mohd Azri, Othman (American Institute of Physics, 2009-06-01)
      In this work, cadmium sulphide (CdS) target with 99.999% purity was used as a target in RF magnetron sputtering. The sputtering experiment was conducted onto silicon oxide substrates at different temperatures ranging from ...
    • Design and fabrication of silicon nanowire based sensor 

      Siti Fatimah, Abd Rahman; Nor Azah, Yusof, Prof. Dr.; Uda, Hashim, Prof. Dr.; Mohammad Nuzaihan, Md Nor (Electrochemical Science Group (ESG), 2013)
      This paper reports the process development of silicon nanowires sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. By using silicon-on-insulator (SOI) wafer as a ...