Browsing Uda Hashim, Prof. Ts. Dr. by Subject "Oxidation"
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Fabrication and characterization of Si quantum dots and SiO2 tunnel barriers grown by a controlled oxidation process
(IOP Publishing Ltd, 2008-01-29)The control of the growth of silicon dioxide (SiO2) and the formation of quantum dots (QDs) play an important role in the fabrication of single-electron transistors (SETs). In this work, SET structures were fabricated using ... -
Thin film thickness and uniformity measurement for lab-on-chip based nanoelectrode biosensor development
(Trans Tech Publications, 2014)One of the advantages of silicon substrate over other semiconductor substrate is the high temperature process capability of the silicon. In this work, silicon wafer is used for thermal processing which involves many high ...