Browsing Uda Hashim, Prof. Ts. Dr. by Subject "Nanofabrication"
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Design and process development of silicon nanowire based DNA biosensor using electron beam lithography
(Institute of Electrical and Electronics Engineering (IEEE), 2008-12-01)Silicon nanowires (SiNWs) have their unique feature such as similar diameters to biomolecules, chemically tailorable physical properties, enable to apply in biomolecule detection and can be fabricated as a high performance ... -
A silicon-oxide-silicon vertically separated electrode nanogap device structure
(American Institute of Physics, 2009-06-01)In this study, we present a simple method to form a nanogap between two silicon contacts separated by a thin oxide gap. We also demonstrate the validity of dielectric spectroscopy results of two wafer samples (different ...