Browsing Uda Hashim, Prof. Ts. Dr. by Subject "Nanoelectrode"
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Nanoelectrode chrome photomask design and specification for biosensor fabrication
(Trans Tech Publications, 2013)This paper explains the most crucial part of any microchip fabrication, which is the mask design for photolithography process. The design is initially sketched roughly to meet the design specification and later on designed ...