Browsing The Library by Subject "Diaphragm"
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Electrostatic pull-in characteristic of silicon diaphragm for MEMS micropump design
(Malaysian Technical Universities Network (MTUN), 2012-11-20)Electrostatic actuation method is commonly employed for MEMS micropump mechanism which consists of diaphragm microstructure and parallel electrode. This work discussed on design and simulation of square silicon diaphragms ...