Browsing The Library by Author "cmos_1945@yahoo.com"
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Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm
M., Shahiri-Tabarestani; B. A., Ganji; R., Sabbaghi-Nadooshan (Institute of Electrical and Electronics Engineers (IEEE), 2012-02-27)This paper presents a high sensitive MEMS capacitive pressure sensor for biomedical applications. Two sensor designs incorporating clamped and slotted diaphragm are implemented and compared to realize the pressure-sensitive ... -
Evaluation of effective factors on Diaphragm's Deflection and mechanical sensitivity of an intraocular capacitive pressure sensor
M. Shahiri-Tabarestani; B. A. Ganji; R. Sabbaghi-Nadooshan (Universiti Malaysia Perlis (UniMAP)School of Mechatronic Engineering, 2012-02-27)To design mechanical pressure sensors, analysis of the deflection behavior of diaphragms is necessary. This paper describes effective factors on diaphragm's deflection and mechanical sensitivity of an Intraocular ...