Browsing The Library by Author "M. D. R., Hashim"
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Simulation using default model in ATHENA/SSUPREM4
Sharifah Norfaezah, Sabki; M. D. R., Hashim (Kolej Universiti Kejuruteraan Utara Malaysia, 2005-05-18)Ion implantation and diffusion processes are very important in the fabrication of bipolar and CMOS transistors. High selectivity’s of ion implantation plays a very important role in forming active device region and low ...