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    Mask Making Process (Positive and Negative Mask) 

    Uda, Hashim, Prof. Dr.; Nur Hamidah, Abdul Halim; Mohamad Nuzaihan, Md Nor; Zul Azhar, Zahid Jamal, Prof. Dr. (Kementerian Pengajian Tinggi Malaysia (KPTM), 2007-08-10)
    Generally, two types of masks are used in MOSFET fabrication; positive mask and negative mask. These resists mask can be used either in lift off process or conventional lithography step depends on the fabrication process ...

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    Author
    Mohamad Nuzaihan, Md Nor (1)
    Nur Hamidah, Abdul Halim (1)Uda, Hashim, Prof. Dr. (1)Zul Azhar, Zahid Jamal, Prof. Dr. (1)SubjectE-beam lithography (EBL) (1)
    EBL System (1)
    Mask (1)PECIPTA 2007 (1)UniMAP -- Exhibition (1)... View MoreDate Issued
    2007 (1)

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