Search
Now showing items 1-2 of 2
Quantum DOT Single Electron Transistor
(School of Microelectronic Engineering, 2008-01-09)
Designing of masks for quantum dot single electron transistor fabrication using E-beam nanolithography
(Nano Science and Technology Institute, 2007)
Quantum dot single electron transistor (QD SET) is able to be fabricated through a joint technique of e-beam lithography (EBL), pattern dependent oxidation (PADOX) and high density plasma etching. In this research, we have ...