Browsing Researchers by Subject "XeF2 vapor etching"

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    • Investigation of XeF2 dry etching for contact isolation of screen printed IBC solar cell 

      Mohd Khairunaz; Suhaila, Sapeai; Ayu Wazira, Azhari; Kamaruzzaman, Sopian; Saleem Hussain, Zaidi (Institute of Electrical and Electronics Engineers Inc., 2013-06)
      We demonstrated the use of Xenon Difluoride (XeF2) plasma less vapor etching for isolation of n and p regions in screen-printed interdigitated back contact (IBC) solar cell. The fabrication process is free from lithography ...