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Design, simulation and process development for Sol Single-Electron Transistor (SET) fabrication
(Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 2006-04)
Single-electron transistor (SET) is one of the promising nanotechnologies and
distinguished by a very small device size and low power dissipation. This project explains
the SET mask design, SET process flow development, ...