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Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization
(Universiti Malaysia Perlis (UniMAP), 2011)
This study demonstrates the process development of silicon nanowires (SiNWs)
sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. Prior to actual fabrication process, ...
Fabrication and characterization of silicon and polysilicon nanogaps electrodes using size reduction technique for chemical and biomolecules detection
(Universiti Malaysia Perlis (UniMAP), 2012)
Nanogap electrodes may be defined as a pair of electrodes separated by nano-scale spacing. Two important studies enabled the non-scientists to envision the development of nanogap-based electrical and electronic sensors and ...
Fabrication of Silicon Nanowires using Scanning Electron Microscope based Electron Beam Lithography method
(Universiti Malaysia Perlis, 2007)
Nanowires is a new class of materials that have attracted attention and great research interest in the last few years because of their potential applications in nanotechnology such as nanoelectronic, nanomechanical and ...