|
iRepository at Perpustakaan UniMAP >
Items for Subject "E-beam lithography (EBL)"
Showing 2 items.
| Issue Date | Title | Author(s) |
| 19-May-2006 |
MOS Transistor Mask Design Using SEM Based E-Beam Lithography |
Uda, Hashim, Prof. Dr.; Nur Hamidah, Abdul Halim; Mohammad Nuzaihan, Md Nor; Zul Azhar, Zahid Jamal, Prof. Dr.; uda@kukum.edu.my |
| 10-Aug-2007 |
Mask Making Process (Positive and Negative Mask) |
Uda, Hashim, Prof. Dr.; Nur Hamidah, Abdul Halim; Mohamad Nuzaihan, Md Nor; Zul Azhar, Zahid Jamal, Prof. Dr.; uda@unimap.edu.my |
|
