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Please use this identifier to cite or link to this item: http://dspace.unimap.edu.my:80/xmlui/handle/123456789/8825

Title: Nanowire formation using electron beam lithography
Authors: Rahman, S. F. A.
Uda, Hashim, Prof. Dr.
Mohammad Nuzaihan, Md Nor
Mohamed Nuri, A. M.
Mohamad Emi Azri, Shohini
Salleh, S.
Keywords: Electron beam lithography;Elphy quantum;Nanowire design;International Conference on Nanoscience and Nanotechnology
Issue Date: 1-Jun-2009
Publisher: American Institute of Physics
Citation: Vol.1136, 2009, p.504-508
Series/Report no.: Proceedings of the International Conference on Nanoscience and Nanotechnology 2008
Abstract: Miniaturization and performance improvements are driving the electronics industry to shrink the feature size of semiconductor device. Because of its diffraction limit, conventional photolithography is becoming increasingly insufficient. In this paper, the recent development of the silicon nanowire based on electron beam lithography technique is reviewed. EBL technology is a best tool to fabricate patterns having nanometer feature sizes. In this project, the exposure process was carried out by an inhouse modified electron beam writing system using JOEL JSM 6460LA SEM integrated with ELPHY Quantum pattern generator. Following an introduction of this technique, the software description, pattern design formation and resist development are separately examined and discussed.
Description: Link to publisher's homepage at http://www.aip.org/
URI: http://link.aip.org/link/?APCPCS/1136/504/1
http://hdl.handle.net/123456789/8825
ISSN: 0094-243X
Appears in Collections:Conference Papers
Uda Hashim, Prof. Dr.

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