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http://hdl.handle.net/123456789/8821
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| Title: | Pattern designed for combination of optical lithography and electron beam lithography |
| Authors: | S. Fatimah, Abd Rahman
Uda, Hashim, Prof. Dr.
Mohammad Nuzaihan, Md Nor
A. M., Mohamed Nuri
Muhamad Emi Azri, Shohini |
| Keywords: | Electron beam lithogrphy
Optical lithography
Nanowire
Silicon on insulator (SOI)
Malaysian Technical Universities Conference on Engineering and Technology (MUCEET) |
| Issue Date: | 20-Jun-2009 |
| Publisher: | Universiti Malaysia Pahang |
| Citation: | p.1-4 |
| Series/Report no.: | Proceedings of the Malaysian Technical Universities Conference on Engineering and Technology (MUCEET) 2009 |
| Abstract: | In this paper the fabricated pattern of
nanometer and micrometer structures created with
electron beam lithography (EBL) and optical
lithography on silicon on insulator (SOI) material
is presented. The resist used to demonstrate this
EBL pattern creation is ma-N 2403 which is a
negative tone photoresist series, while positive
resist is used for transform mask design using
optical lithography. Three different patterns
structures are fabricated on the sample namely
alignment mark, silicon nanowire and metal pad.
Silicon nanowire is designed using GDS II Editor
Software and exposed using SEM based EBL
system while alignment mark and metal pad are
designed using AutoCAD and exposed using
conventional photolithography process. The
fabricated structures are observed using high
power microscope and SEM imaging. |
| Description: | Malaysian Technical Universities Conference on Engineering and Technology organized by Universiti Malaysia Pahang in collaboration with Universiti Tun Hussein Onn Malaysia, Universiti Teknikal Malaysia Melaka & Universiti Malaysia Perlis on
June 20th - 22nd, 2009, at MS Garden Hotel, Kuantan, Pahang, Malaysia. |
| URI: | http://hdl.handle.net/123456789/8821 |
| Appears in Collections: | Uda Hashim, Prof. Dr.
Conference Papers
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Files in This Item:
| File |
Description |
Size | Format |
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| 089-092.pdf | Access is limited to UniMAP community | 1.09 MB | Adobe PDF | View/Open |
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