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Please use this identifier to cite or link to this item: http://dspace.unimap.edu.my:80/dspace/handle/123456789/8426

Title: A very high Q-factor inductor using MEMS technology
Authors: Khalid, N.
Shah, K.
Singh, J.
Le, H. P.
Devlin, J.
Zaliman, Sauli, Lt. Assoc. Prof.
Keywords: High Quality (Q) factor;high radio frequency (RF);Inductor;Micro-electro-mechanical System (MEMS);Q-factor
Issue Date: 30-Mar-2010
Publisher: SPIE
Citation: Proceeding of SPIE, vol. 7646 (1), 2010, p.76461I
Series/Report no.: Proceedings of the Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2010
Description: Link to publisher's homepage at http://spiedigitallibrary.aip.org/
URI: http://dx.doi.org/10.1117/12.848686
http://hdl.handle.net/123456789/8426
ISBN: 978-081948061-3
ISSN: 0277-786X
Appears in Collections:Conference Papers

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