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Title: Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography
Authors: Uda, Hashim, Prof. Dr.
Muhamad Emi Azri, Shohini
Keywords: DNA hybridization;Lab-on-a-chip;Nanogap;Reverse spacer lithographic;Spacer patterning technology;International Conference on Advancement of Materials and Nanotechnology 2007;ICAMN 2007
Issue Date: 11-Mar-2010
Publisher: American Institute of Physics
Citation: AIP Conference Proceedings, vol.1217 (1), 2010, pages 505-509
Series/Report no.: Proceedings of International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007
Abstract: A reversed spacer patterning technology using a sacrificial layer and a chemical vapor deposition (CVD) spacer layer has been developed, and is demonstrated to achieve sub-50 nm structures with conventional dry etching. The minimum-sized features are defined not by the photolithography but by the CVD film thickness. Therefore, this technology yields critical dimension (CD) variations of minimum-sized features much smaller than that achieved by conventional optical or e-beam lithography and has a great potential to fabricate a nanosystems for the electrical detection of biomolecular interactions.
Description: International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007, 29th May - 1st June 2007 was held at Pulau Langkawi, Kedah, Malaysia. Link to publisher's homepage at http://proceedings.aip.org/
URI: http://link.aip.org/link/?APCPCS/1217/505/1
ISBN: 978-073540760-2
ISSN: 0094-243X
Appears in Collections:Uda Hashim, Prof. Dr.
Conference Papers

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