|
iRepository at Perpustakaan UniMAP >
UNIVERSITY LIBRARY >
Conference Papers >
Please use this identifier to cite or link to this item:
http://hdl.handle.net/123456789/8205
|
| Title: | Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography |
| Authors: | Hashim, Uda
Muhamad Emi Azri, Shohini |
| Keywords: | DNA hybridization
Lab-on-a-chip
Nanogap
Reverse spacer lithographic
Spacer patterning technology
International Conference on Advancement of Materials and Nanotechnology 2007
ICAMN 2007 |
| Issue Date: | 11-Mar-2010 |
| Publisher: | American Institute of Physics |
| Citation: | AIP Conference Proceedings, vol.1217 (1), 2010, pages 505-509 |
| Series/Report no.: | Proceedings of International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007 |
| Abstract: | A reversed spacer patterning technology using a sacrificial layer and a chemical vapor deposition (CVD) spacer layer has been developed, and is demonstrated to achieve sub-50 nm structures with conventional dry etching. The minimum-sized features are defined not by the photolithography but by the CVD film thickness. Therefore, this technology yields critical dimension (CD) variations of minimum-sized features much smaller than that achieved by conventional optical or e-beam lithography and has a great potential to fabricate a nanosystems for the electrical detection of biomolecular interactions. |
| Description: | International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007, 29th May - 1st June 2007 was held at Pulau Langkawi, Kedah, Malaysia.
Link to publisher's homepage at http://proceedings.aip.org/ |
| URI: | http://link.aip.org/link/?APCPCS/1217/505/1
http://hdl.handle.net/123456789/8205 |
| ISBN: | 978-073540760-2 |
| ISSN: | 0094-243X |
| Appears in Collections: | Conference Papers
|
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
|
